Techniques to form uniform and stable silicide

摘要

In one aspect, a method of fabricating a metal silicide includes the following steps. A semiconductor material selected from the group consisting of silicon and silicon germanium is provided. A metal(s) is deposited on the semiconductor material. A first anneal is performed at a temperature and for a duration sufficient to react the metal(s) with the semiconductor material to form an amorphous layer including an alloy formed from the metal(s) and the semiconductor material, wherein the temperature at which the first anneal is performed is below a temperature at which a crystalline phase of the alloy is formed. An etch is used to selectively remove unreacted portions of the metal(s). A second anneal is performed at a temperature and for a duration sufficient to crystallize the alloy thus forming the metal silicide. A device contact and a method of fabricating a FET device are also provided.

主权项

1. A device contact, comprising:
a metal silicide containing nickel and platinum formed on a semiconductor substrate, wherein the metal silicide is a continuous layer on the semiconductor substrate having an average grain size that is greater than about 3 times an average thickness of the metal silicide, wherein a uniform alloy distribution is present in the metal silicide such that an average atomic percent variation of the platinum between a top half of the metal silicide and a bottom half of the metal silicide is less than about 50% of a total atomic percent of the platinum in the metal silicide, and wherein the metal silicide has an epitaxial texture in that a grain orientation of the metal silicide is patterned off of the semiconductor substrate.