| 摘要 |
<p>PROBLEM TO BE SOLVED: To adjust a direction of a workpiece holder with respect to a crystal orientation of a columnar ingot at higher accuracy in adhering the workpiece holder on a circumferential surface of the ingot via a slice table.SOLUTION: A first measurement step S11 of measuring a crystal orientation of an ingot; a first rotation step S13 of rotating the ingot in a circumferential direction by using a measurement result in the first measurement step such that the crystal orientation becomes horizontal; a second measurement step S15 of measuring the crystal orientation of the ingot rotated in the first rotation step again; and second rotation steps S12N, S13 of rotating the ingot again in the circumferential direction by using a measurement result in the second measurement step such that the crystal orientation becomes horizontal in the case where a first inclination angle which the crystal orientation forms with respect to a horizontal plane is not within an allowable range are executed. Then, a slice table is adhered to the ingot, the workpiece holder is temporarily adhered on a top surface of the slice table, and permanently adhered after the workpiece holder is rotated to become parallel with the crystal orientation.</p> |
