LINEAR MOTOR, EXPOSURE DEVICE, DEVICE MANUFACTURING METHOD, AND COIL UNIT

摘要

PROBLEM TO BE SOLVED: To provide a linear motor which achieves good cooling efficiency with a simple structure.SOLUTION: A coil unit 50 of a linear motor includes: a constant temperature plate 66 which is disposed so that an upper surface faces a magnet unit; an upper coil part 64 which is provided at the lower surface side of the constant temperature plate 66 and includes multiple coils 62; a lower coil part 58 which is provided at the opposite side of the constant temperature plate 66 with respect to the upper coil part 64 and includes multiple coils 56; and a cooling plate 60 which is provided between the upper coil part 64 and the lower coil part 58 and cools the upper coil part 64 and the lower coil part 58. An air layer 82 formed between the upper coil part 64 and the constant temperature plate 66 blocks heat transmission between the upper coil part 64 and the constant temperature plate 66.