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发明名称
支援资讯显示方法、基板处理装置之维护支援方法、支援资讯显示控制装置、基板处理系统及程式
摘要
以视觉的方式将作业员所需的资讯或想使作业员周知的资讯提供给作业员。基板处理系统(100A)之显示控制装置(40),系为了在作业员进行基板处理装置(10)的维修作业时将关于维修的支援资讯即时显示于作业员所装设的头戴式显示器(HMD)(30),而透过具备有HMD30的摄像机,取得拍摄了在基板处理装置(10)进行维修之预定部位的影像,并从储存于资料库的资讯推定包含于所取得的影像之关于预定部位的支援资讯,将所推定的支援资讯进行影像化,将所制作的影像显示于HMD30,藉此,使作业员目视确认支援资讯。
申请公布号
TW201510909
申请公布日期
2015.03.16
申请号
TW103105199
申请日期
2014.02.18
申请人
东京威力科创股份有限公司 TOKYO ELECTRON LIMITED
发明人
儿玉俊昭 KODAMA, TOSHIAKI;山内彻 YAMAUCHI, TORU;小林仙尙 KOBAYASHI, SENSHO;中村博 NAKAMURA, HIROSHI;池田岳 IKEDA, GAKU;鱼山和哉 UOYAMA, KAZUYA
分类号
G06Q50/04(2012.01);G02B27/01(2006.01)
主分类号
G06Q50/04(2012.01)
代理机构
代理人
林志刚
主权项
地址
日本 JP
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