发明名称 SEMICONDUCTOR-ON-INSULATOR DEVICE INCLUDING STAND-ALONE WELL IMPLANT TO PROVIDE JUNCTION BUTTING
摘要 A semiconductor device includes a semiconductor-on-insulator (SOI) substrate having a bulk substrate layer, an active semiconductor layer, and a buried insulator layer interposed between the bulk substrate layer and the active semiconductor layer. A first source/drain (S/D) region includes a first stand-alone butting implant having a first butting width. A second S/D region includes a second stand-alone butting implant having a second butting width. A gate well-region is interposed between the first and second S/D regions. The gate well-region has a gate width that is greater than the first and second butting widths.
申请公布号 US2015069513(A1) 申请公布日期 2015.03.12
申请号 US201314023602 申请日期 2013.09.11
申请人 International Business Machines Corporation 发明人 Guo Dechao;Haensch Wilfried E.;Wang Gan;Wang Xin;Wang Yanfeng;Wong Keith Kwong Hon
分类号 H01L29/786;H01L29/78 主分类号 H01L29/786
代理机构 代理人
主权项 1. A semiconductor device, comprising: a semiconductor-on-insulator (SOI) substrate including a bulk substrate layer, an active semiconductor layer, and a buried insulator layer interposed between the bulk substrate layer and the active semiconductor layer; a first source/drain (S/D) region including a first stand-alone butting implant formed therein, the first stand-alone butting implant having a first butting width; a second S/D region including a second stand-alone butting implant formed therein, the second stand-alone butting implant having a second butting width; and a gate well-region interposed between the first and second S/D regions, the gate well-region having a gate width that is greater than the first and second butting widths.
地址 Armonk NY US