发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor device which can reduce manufacturing cost and achieve a stable operation.SOLUTION: A semiconductor device comprises an active silicon layer 3 provided on a buried oxide film 2. The active silicon layer 3 has a low-voltage region 4, a high-voltage region 5 and a connection region 6. The semiconductor device comprises: trench isolation 7 for insulatively isolate the low-voltage region 4, the high-voltage region 5 and the connection region 6 from each other; a low-potential signal processing circuit 8 provided in the low-voltage region 4; a high-potential signal processing circuit 9 provided in the high-voltage region 5; and capacitances 15, 17 provided on the connection region 6, for transferring an AC signal from the low-potential signal processing circuit 8 to the high-potential signal processing circuit 9. The capacitances 15, 17 have low-potential electrodes 15a, 17a, respectively, which are connected to the low-potential signal processing circuit 8 and high-potential electrodes 15b, 17b, respectively, which are connected to the high-potential signal processing circuit 9. The low-potential electrodes 15a, 17a and the high-potential electrodes 15b, 17b each has a plurality of stacked wiring layers. Side walls of the wiring layers of both of the low-potential electrodes 15a and the high-potential electrode 15b are opposed to each other and form capacitive coupling, and side walls of the wiring layers of both of the low-potential electrode 17a and the high-potential electrode 17b are opposed to each other and form capacitive coupling.
申请公布号 JP2015046549(A) 申请公布日期 2015.03.12
申请号 JP20130178144 申请日期 2013.08.29
申请人 MITSUBISHI ELECTRIC CORP 发明人 SHIMIZU KAZUHIRO
分类号 H01L21/822;H01L27/04;H02M7/48 主分类号 H01L21/822
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