| 发明名称 |
ELECTROSTATIC CHUCK MEMBER |
| 摘要 |
There is provided an electrostatic chuck member made of a complex oxide sintered body obtained by substituting some of yttrium in yttrium aluminum oxide with a rare earth element (RE) excluding yttrium, in which a ratio [NRE/(NY+NRE)] of the number of atoms of the rare earth element excluding yttrium (NRE) to the sum (NY+NRE) of the number of yttrium atoms (NY) and the number of the atoms of the rare earth element excluding yttrium (NRE) is in a range of 0.01 to less than 0.5, and a volume resistance of the complex oxide sintered compact is in a range of 1×1010 Ω·cm to less than 1×1015 Ω·cm. |
| 申请公布号 |
US2015070815(A1) |
申请公布日期 |
2015.03.12 |
| 申请号 |
US201214374537 |
申请日期 |
2012.08.03 |
| 申请人 |
Kugimoto Hironori;Ando Kazuto |
发明人 |
Kugimoto Hironori;Ando Kazuto |
| 分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. An electrostatic chuck member, which is made of a complex oxide sintered body obtained by substituting some of yttrium in yttrium aluminum oxide with a rare earth element (RE) excluding yttrium,
wherein a ratio [NRE/(NY+NRE)] of the number of atoms of the rare earth element excluding yttrium (NRE) to the sum (NY+NRE) of the number of yttrium atoms (NY) and the number of the atoms of the rare earth element excluding yttrium (NRE) is in a range of 0.01 to less than 0.5, and a volume resistance of the complex oxide sintered body is in a range of 1×1010 Ω·cm to less than 1×1015 Ω·cm. |
| 地址 |
Tokyo JP |
