发明名称 DEVICE FOR THE REMOVAL OF A COVERING FROM A SUBSTRATE AND A METHOD PERTAINING THERETO
摘要 A device (1) for removing a coating, particularly a photoresist, from a substrate (10) in at least one area of the substrate (10), comprises a nozzle (11) suitable for applying a jet of a solution medium to the substrate.
申请公布号 US2015068556(A1) 申请公布日期 2015.03.12
申请号 US201314389038 申请日期 2013.03.26
申请人 SOLAR-SEMI GMBH 发明人 Muffler Pirmin
分类号 H01L21/67 主分类号 H01L21/67
代理机构 代理人
主权项
地址 Radolfzell DE