发明名称 PHOTONIC CRYSTAL NANO STRUCTURE METHOD FOR MAKING THE SAME
摘要 <p>The present invention relates to a photonic crystal nanostructure manufacturing method. The photonic crystal nanostructure manufacturing method of the present invention comprises: a pattern layer laminating step of repeatedly laminating a first pattern layer and a second pattern layer on a substrate; and an opening forming step of forming a first opening on the first pattern layer and forming a second opening having an area smaller than that of the first opening on the second pattern layer while being ranged in an imaginary straight line extended in a depth direction from the first opening. Accordingly, the present invention provides the photonic crystal nanostructure manufacturing method capable of exhibiting a structure color by phenomenon such as optical interference and the like.</p>
申请公布号 KR101501005(B1) 申请公布日期 2015.03.12
申请号 KR20140059192 申请日期 2014.05.16
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 KIM, JEONG HWAN;CHANG, SUNG HWAN;CHOI, DOO SUN;YOO, YEONG EUN;YOON, JAE SUNG;JEON, EUN CHAE
分类号 B82B1/00;B82B3/00;G03F7/00 主分类号 B82B1/00
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