PHYSICAL QUANTITY SENSOR, VIBRATORY DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A physical quantity sensor includes a substrate, a fixation section and a wiring line provided to the substrate, a contact section adapted to electrically connect the fixation section and the wiring line to each other, and a movable electrode electrically connected to the wiring line via the fixation section. The contact section is disposed in the fixation section in a second area outside a first area obtained by imaginarily extending a fixed support area in a displacement direction of the movable electrode in a plan view. The fixed support area is sandwiched by edge portions of an area where the movable electrode and the fixation section are connected to each other.

主权项

1. A device comprising:
a substrate; a fixation section and a wiring line provided to the substrate; a contact section where the fixation section and the wiring line are electrically connected to each other; and a movable electrode electrically connected to the wiring line via the fixation section, wherein the contact section is disposed in a second area of the fixation section, the second area is outside of a first area, the first area is obtained by imaginarily extending a fixed support area in a displacement direction of the movable electrode in a plan view, and the fixed support area is where the movable electrode and the fixation section are connected to each other.