FINFET DEVICE HAVING A MERGED SOURCE DRAIN REGION UNDER CONTACT AREAS AND UNMERGED FINS BETWEEN CONTACT AREAS, AND A METHOD OF MANUFACTURING SAME

摘要

A method for manufacturing a fin field-effect transistor (FinFET) device, comprises forming a plurality of fins on a substrate, forming a plurality of gate regions on portions of the fins, wherein the gate regions are spaced apart from each other, forming spacers on each respective gate region, epitaxially growing a first epitaxy region on each of the fins, stopping growth of the first epitaxy regions prior to merging of the first epitaxy regions between adjacent fins, forming a dielectric layer on the substrate including the fins and first epitaxy regions, removing the dielectric layer and first epitaxy regions from the fins at one or more portions between adjacent gate regions to form one or more contact area trenches, and epitaxially growing a second epitaxy region on each of the fins in the one or more contact area trenches, wherein the second epitaxy regions on adjacent fins merge with each other.

主权项

1. A method for manufacturing a fin field-effect transistor (FinFET) device, the method comprising:
forming a plurality of fins on a substrate; forming a plurality of gate regions on portions of the fins, wherein the gate regions are spaced apart from each other; forming spacers on each respective gate region; epitaxially growing a first epitaxy region on each of the fins; stopping growth of the first epitaxy regions prior to merging of the first epitaxy regions between adjacent fins; forming a dielectric layer on the substrate including the fins and the first epitaxy regions; removing the dielectric layer and the first epitaxy regions from the fins at one or more portions between adjacent gate regions to form one or more contact area trenches; and epitaxially growing a second epitaxy region on each of the fins in the one or more contact area trenches, wherein the second epitaxy regions on adjacent fins merge with each other.