发明名称 NON-VOLATILE MEMORY DEVICE
摘要 A non-volatile memory device includes an isolation layer formed over a substrate to define an active region, a floating gate formed over the substrate, a selection gate formed over the substrate on one side of the floating gate and formed to be adjacent to the floating gate with a first gap from the floating gate, a control plug formed over the isolation layer on the other side of the floating gate and formed to be adjacent to the floating gate with a second gap from the floating gate, and a charge blocking layer formed to gap-fill the first gap and the second gap.
申请公布号 US2015069486(A1) 申请公布日期 2015.03.12
申请号 US201314135141 申请日期 2013.12.19
申请人 SK hynix Inc. 发明人 PARK Sung-Kun
分类号 H01L29/788 主分类号 H01L29/788
代理机构 代理人
主权项 1. A non-volatile memory device, comprising: an isolation layer formed over a substrate to define an active region; a floating gate formed over the substrate; a selection gate formed over the substrate on one side of the floating gate and formed to be adjacent to the floating gate with a first gap from the floating gate; a control plug formed over the isolation layer on the other side of the floating gate and formed to be adjacent to the floating gate with a second gap from the floating gate; and a charge blocking layer formed to gap-fill the first gap and the second gap.
地址 Gyeonggi-do KR