FOIL TRAP AND LIGHT SOURCE DEVICE USING SUCH FOIL TRAP

摘要

The present invention discloses a rotation-type foil trap in which even when an EUV light source is undergoing high input operation, and without reducing the transmissivity of extreme ultraviolet light (EUV), foil temperature increases are suppressed and the foil trap has sufficient service life. Provided is the rotation-type foil trap, wherein the ends of each piece of foil (4a) are inserted into a plurality of grooves (4d) provided on the lateral surface of a central support column (4c), and the central support column (4c) and each of the pieces of foil (4a) are fixed by soldering. For the soldering material, gold solder is preferable. By giving the central support column (4c) a truncated cone shape, the temperature gradient of the foil is mitigated, and the processing of grooves for attaching the foil becomes easier. By making the thickness of the foil (4a) 0.2-0.5mm, deformations due the temperature gradient of the foil can be reduced. By forming a conduit in the inside of the central support column (4c) and causing a liquid to flow therein, the temperature of each piece of foil can be maintained at a temperature which is at least the melting point and no more than a vaporization temperature of a plasma starting material, and at no more than the recrystallization temperature of the material for forming the foil.