| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity detection element capable of sufficiently suppressing vibration leakage. <P>SOLUTION: A gyro element (physical quantity detection element) 1 comprises: a base portion 2; a pair of first projecting portions 3 (3a and 3b), that projects along an X-axis from the base portion 2 in directions opposite to each other; a first driving arm 11a that obliquely extends from the first projecting portion 3a and a second driving arm 11b that obliquely extends from the first projecting portion 3a in the same manner as the first driving arm 11a and vibrates with a reverse phase to that of the first driving arm 11a; a third driving arm 12a that obliquely extends from the first projecting portion 3b and a fourth driving arm 12b that obliquely extends from the first projecting portion 3b in the same manner as the third driving arm 12a and vibrates with a reverse phase to that of the third driving arm 12a; a first detecting arm 13a that extends from the base portion 2 in a Y(+)-axis direction and a second detecting arm 13b that extends in a Y(-)-axis direction; and a third detecting arm 14a that extends from the base portion 2 in the Y(+)-axis direction and a fourth detecting arm 14b that extends in the Y(-)-axis direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
