发明名称 |
A MEMS Switch Device and Method of Fabrication |
摘要 |
A MEMS switch device including: a substrate layer; an insulating layer formed over the substrate layer; and a MEMS switch module having a plurality of contacts formed on the surface of the insulating layer, wherein the insulating layer includes a number of conductive pathways formed within the insulating layer, the conductive pathways being configured to interconnect selected contacts of the MEMS switch module. |
申请公布号 |
EP2833388(A3) |
申请公布日期 |
2015.03.11 |
申请号 |
EP20140178181 |
申请日期 |
2014.07.23 |
申请人 |
ANALOG DEVICES TECHNOLOGY |
发明人 |
MACNAMARA, JOHN G.;FITZGERALD, PADRAIG L.;GOGGIN, RAYMOND C.;STENSON, BERNARD PATRICK |
分类号 |
H01H59/00;B81C1/00;H01H1/00 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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