| 摘要 |
The purpose of the present invention is to provide a spin processor capable of realizing the miniaturization and weight lightening of a device while preventing liquid splashing to a substrate. A spin processor (1) includes a liquid receiving part (6) which has a ring shape to surround the outer side of a rotating substrate (W) and receives the liquid splashed from the rotating substrate (W), a cup body (3) which has a ring shape to surround the liquid receiving part (6) and has a ring-shaped outer exhaust flow path (A2) for generating air current along the outer surface from the upper side of the liquid receiving part (6), and a partition member (7) which is installed in the ring of the liquid receiving part, has a ring shape, has a ring-shaped outer exhaust flow path (A1) for generating air current along the inner surface of the liquid receiving part (6). |
