发明名称 Substrate for epitaxial growth
摘要 A surface of a substrate consists of a plurality of neighboring stripes. Longer edges of the flat surfaces are parallel one to another and planes of these surfaces are disoriented relatively to the crystallographic plane of gallium nitride crystal defined by Miller-Bravais indices (0001), (11-22) or (11-20). The disorientation angle of each of the flat surfaces is between 0 and 3 degrees and is different for each pair of neighboring flat surfaces. The substrate according to the invention allows epitaxial growth of a layered AlInGaN structure by a MOCVD or MBE method which allow to obtain a non-absorbing mirrors laser diode emitting a light in the wavelength from 380 to 550 nm.
申请公布号 US8975639(B2) 申请公布日期 2015.03.10
申请号 US201113639907 申请日期 2011.03.15
申请人 Instytut Wysokich Ciśnień Polskiej Akademi Nauk 发明人 Perlin Piotr;Sarzyński Marcin;Leszczyński Michal;Czernecki Robert;Suski Tadeusz
分类号 C30B29/40;B82Y20/00;C30B25/18;C30B33/00;C30B33/12;H01L21/02;H01S5/343;H01L29/20;H01L33/00;H01S5/02;H01S5/20;H01S5/32;H01S5/34;H01S5/40 主分类号 C30B29/40
代理机构 代理人 Kasper Horst M.
主权项 1. A substrate for epitaxial growth made of gallium nitride crystal, and having epi-ready growth surface, wherein the growth surface consists of a set of neighboring flat surfaces in a form of stripes of a width from 1 to 2000 μm, wherein longer edges of the stripes are parallel one to another, wherein planes of the stripes are disoriented relatively to the crystallographic plane defined by Miller-Bravais indices (0001), (10-10), (11-22) or (11-20) and wherein a disorientation angle of each of the flat surfaces is from 0 to 3 degrees and wherein the disorientation angle is different for each of two neighboring surfaces.
地址 Warsaw PL