ESD protection device and method for manufacturing the same

摘要

An ESD protection device is manufactured such that its ESD characteristics are easily adjusted and stabilized. The ESD protection device includes an insulating substrate, a cavity provided in the insulating substrate, at least one pair of discharge electrodes each including a portion exposed in the cavity, the exposed portions being arranged to face each other, and external electrodes provided on a surface of the insulating substrate and connected to the at least one pair of discharge electrodes. A particulate supporting electrode material having conductivity is dispersed between the exposed portions of the at least one pair of discharge electrodes in the cavity.

主权项

1. A method for manufacturing an ESD protection device comprising:
a first step of forming at least one pair of discharge electrodes on at least one of a principal surface of a first insulating layer and a principal surface of a second insulating layer, the at least one pair of discharge electrodes being arranged with a space therebetween; a second step of attaching, in a dispersed manner, a supporting electrode material with conductivity to a portion between the at least one pair of discharge electrodes formed on the one of the principal surface of the first insulating layer and the principal surface of the second insulating layer; a third step of laminating the first insulating layer and the second insulating layer while the principal surface of the first insulating layer and the principal surface of the second insulating layer face each other; and a fourth step of forming external electrodes on a surface of a laminated body obtained through the third step such that the external electrodes are connected to the at least one pair of discharge electrodes; wherein a cavity is formed between the first insulating layer and the second insulating layer inside the laminated body; the at least one pair of discharge electrodes each includes a portion exposed in the cavity; and the supporting electrode material is disposed in the cavity in a dispersed manner.