Inertial sensor and method of manufacturing the same

摘要

Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.

主权项

1. An inertial sensor, comprising:
a plate-shaped membrane; a mass body disposed under a central portion of the membrane; a post disposed under an edge of the membrane so as to support the membrane; and a bottom cap of which the edge is provided with a cavity into which an adhesive is introduced, the adhesive bonding the edge to a bottom surface of the post so as to cover the mass body and the post, wherein the cavity is formed as a shape of groove opened to a direction of the post and is formed on one side of a surface where the cavity is bonded to the post with the adhesive and an adhesive surface of the bottom cap forms a step so that the adhesive is prevented from being permeated toward an inner direction of the post where the mass body is positioned due to a surface tension.