Automatic storage system

摘要

The front automatic storage system includes a plurality of shelves, a transferring apparatus, and a moveable frame. The shelves are arranged facing a semiconductor processing apparatus and at least one of the shelves is positioned above a transfer port of the semiconductor processing apparatus. The transferring apparatus is contrived to move among the shelves and transfer cassettes C between any shelf and the transfer port. The frame is contrived such that it can move the transferring apparatus and the at least one shelf positioned above the transfer port. The frame is also contrived such that it can move in a first horizontal direction toward and away from a first position where the at least one shelf is arranged above the transfer section.

主权项

1. An automatic storage system, comprising:
a transfer port to and from which an article is transferred; a plurality of shelves; a transferring apparatus configured to transfer an article between the shelves and the transfer port; a mover configured to move the transferring apparatus and at least one of the shelves toward and away from the transfer port, the mover being movable in a first horizontal direction toward a first position where the at least one of the shelves are proximal to the transfer port and the transferring apparatus can transfer an article between the shelves and the transfer port, and the mover being movable in a second and opposite horizontal direction to a second position in which the shelves are positioned away from the transfer port such that the article cannot be moved from and to the transfer port, wherein the first horizontal direction and the second and opposite horizontal direction are parallel to each other and are perpendicular to a traveling direction of an automatic guide vehicle that can provide articles to at least one of the shelves; a stopper configured to stop and release the mover at a position located apart from the first position; a guide mechanism configured to guide the mover along the first horizontal direction, the guide mechanism being provided in an area including the first position and excluding the second position; and a positioning mechanism including a fixed plate fixed in the first position on a floor surface on which the mover moves, a first block provided on the fixed plate, and a second block that comes into contact with the first block from a side towards the second position;wherein
the guide mechanism includes a guide roller erectly fixed to the fixed plate and a guide rail configured to be guided by the guide roller, the guide rail includes a first rail member disposed on a lowest portion of the mover and a second rail member arranged on a side of the first rail member towards the second position, and the positioning mechanism and the second rail member position the mover in the first position.