MULTIPLE SENSE AXIS MEMS GYROSCOPE HAVING A SINGLE DRIVE MODE

摘要

A gyroscope includes a first drive mass driven in a first drive motion along a first axis, the first drive motion generating a first sense motion of a first sense mass in response to rotation of the gyroscope. The gyroscope further includes a second drive mass driven in a second drive motion along a second axis that is transverse to the first axis. The second drive motion generates a second sense motion of a second sense mass in response to rotation of the gyroscope. A drive spring system interconnects the two drive masses to couple the first and second drive motions so that a single drive mode can be implemented. The sense motion of each sense mass is along a third axis, where the third axis is transverse to the other axes. The sense motion is translational motion such the sense masses remain parallel to the surface of the substrate.

主权项

1. A MEMS gyroscope comprising:
a first drive mass configured to be driven in a first drive motion along a first axis; a second drive mass configured to be driven in a second drive motion along a second axis that is transverse to said first axis, each of said first and second axes being parallel to a surface of a substrate; a drive spring system interconnecting said first drive mass with said second drive mass to couple said first drive motion to said second drive motion; a first sense mass coupled to said first drive mass such that said first drive motion generates first sense motion of said first sense mass along a third axis in response to rotation of said MEMS gyroscope, said third axis being transverse to each of said first and second axes, said first sense motion being translational motion such that a first planar surface of said first sense mass remains substantially parallel to said surface of said substrate; and a second sense mass coupled to said second drive mass such that said second drive motion generates second sense motion of said second sense mass along said third axis in response to rotation of said MEMS gyroscope, said second sense motion being translational motion such that a second planar surface of said second sense mass remains substantially parallel to said surface of said substrate.