| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing apparatus capable of surely forming a desired processing groove.SOLUTION: The processing apparatus for forming a groove by removing a part of a thin film layer formed on a substrate surface includes: a patterning tool having a cutting edge on a tip; a patterning head including a first portion having a longitudinal direction in a vertical direction and capable of holding the patterning tool on a lower end part of the first portion while holding a state where the cutting edge is directed vertically downward; and static pressure guide means including a guide part surrounding a part of the first portion of the patterning head in a horizontal plane and capable of guiding the patterning head in a vertical direction along the guide part while holding the patterning head in a non-contact state with the guide part by ejecting air respectively from a plurality of ejection holes formed on the surface of the first portion of the patterning head to an opposite face of the guide part. |
