发明名称 TIGHTNESS TEST DURING THE EVACUATION OF A FILM CHAMBER
摘要 The invention relates to a method for testing the sealing tightness of a test sample (18), containing a gas, in a film chamber (12) made from flexible material. Said film chamber (12) is evacuated by a vacuum pump (28). The invention is characterized in that the gas flow flowing out from the film chamber (12) and generated by the vacuum pump (28) is measured during the evacuation and is examined with respect to a possible leak of the test sample (18).
申请公布号 WO2015028338(A2) 申请公布日期 2015.03.05
申请号 WO2014EP67591 申请日期 2014.08.18
申请人 INFICON GMBH 发明人 WETZIG, DANIEL;DECKER, SILVIO
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