SELF-SENSING ARRAY OF MICROCANTILEVERS FOR CHEMICAL DETECTION

摘要

The invention provides a chemical detection system for detecting at least one target chemical species, including a self-sensed cantilevered probe array having a plurality of self-sensed cantilevered probes, at least one chemical-sensitive coating material applied to at least one cantilevered probe in the cantilevered probe array, and an interface circuit that is coupled to the cantilevered probe array. At least one cantilevered probe in the cantilevered probe array exhibits a shifted cantilevered probe response when the cantilevered probe array is exposed to the target chemical species and the interface circuit actuates the cantilevered probe. A handheld chemical detection system and a method of operation are also disclosed.

主权项

1. A method for detecting, identifying, and/or characterizing at least one target chemical species, the method comprising:
exposing a sensor probe to the target chemical species, the sensor probe having an integrated resistive heater and an outer surface for contacting the target chemical species; heating the sensor probe; analyzing a response received from the sensor probe; and detecting, identifying, and/or characterizing the target chemical species based on the analyzed response.