发明名称 |
RESISTIVE PRESSURE SENSOR INCLUDING PIEZO-RESISTIVE ELECTRODE |
摘要 |
Provided is a pressure sensor including an elastic thin film including a first surface and a second surface that face each other, the elastic thin film including an elastomer material, a plurality of protruding deformable structures patterned on the first surface; a piezoresistive electrode formed along surfaces of the plurality of protruding deformable structures; and a counter electrode disposed to face the piezoresistive electrode. |
申请公布号 |
US2015059486(A1) |
申请公布日期 |
2015.03.05 |
申请号 |
US201414478755 |
申请日期 |
2014.09.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHOONG Chwee Lin;PARK Jongjin;BAE Jihyun;LEE Byoungsun;IM Jungkyun |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
1. A pressure sensor comprising:
an elastic thin film comprising a first surface and a second surface that face each other, the elastic thin film comprising an elastomer material; a plurality of protruding deformable structures patterned on the first surface; a piezoresistive electrode formed along surfaces of the plurality of protruding deformable structures; and a counter electrode disposed to face the piezoresistive electrode. |
地址 |
Suwon-si KR |