| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for practically and efficiently producing monofluoromethane substantially free of halogens other than fluorine, which is demanded in the semiconductor industry. <P>SOLUTION: This method for producing monofluoromethane at least includes: a thermal cracking step of thermally cracking 1-methoxy-1,1,2,2-tetrafluoroethane in contact with a catalyst; and a recovery step of recovering monofluoromethane from the cracked product. The separation performed in the recovery process can be made by distillation, absorption, reaction, or the like. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
