Korpuskularstrahl-Bearbeitungsgeraet mit einem Objekttisch und Ablenkmitteln fuer den Strahl,申请号DE19681804646-传众专利搜索

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发明名称	Korpuskularstrahl-Bearbeitungsgeraet mit einem Objekttisch und Ablenkmitteln fuer den Strahl
摘要
申请公布号	DE1804646(A1)	申请公布日期	1970.09.17
申请号	DE19681804646	申请日期	1968.10.18
申请人	SIEMENS AG	发明人	REHME,DIPL.-PHYS.HANS;TOEGEL,DIPL.-PHYS.KURT
分类号	G05B19/39;H01J37/304	主分类号	G05B19/39
代理机构		代理人
主权项
地址

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