| 发明名称 |
Balancing pressure to improve a fluid seal |
| 摘要 |
A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.
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| 申请公布号 |
US8168057(B2) |
申请公布日期 |
2012.05.01 |
| 申请号 |
US20100790264 |
申请日期 |
2010.05.28 |
| 申请人 |
KEIGLER ARTHUR;WU QUNWEI;LIU ZHENQIU;HARRELL JOHN;NEXX SYSTEMS, INC. |
发明人 |
KEIGLER ARTHUR;WU QUNWEI;LIU ZHENQIU;HARRELL JOHN |
| 分类号 |
C25D5/02;H01L21/00 |
主分类号 |
C25D5/02 |
| 代理机构 |
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代理人 |
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