发明名称 |
TREATMENT LIQUID FOR INHIBITING PATTERN COLLAPSE IN MICROSTRUCTURES, AND MICROSTRUCTURE MANUFACTURING METHOD USING SAID TREATMENT LIQUID |
摘要 |
There are provided a processing liquid for suppressing pattern collapse of a microstructure which includes at least one compound selected from the group consisting of an imidazolium halide containing an alkyl group having 12, 14 or 16 carbon atoms, a pyridinium halide containing an alkyl group having 14 or 16 carbon atoms and an ammonium halide containing an alkyl group having 16 or 18 carbon atoms, and water; and a method for producing a microstructure formed of silicon oxide using the processing liquid. |
申请公布号 |
EP2615632(A4) |
申请公布日期 |
2015.03.04 |
申请号 |
EP20110823335 |
申请日期 |
2011.07.14 |
申请人 |
MITSUBISHI GAS CHEMICAL COMPANY, INC. |
发明人 |
MATSUNAGA, HIROSHI;OHTO, MASARU |
分类号 |
H01L21/311;B81C1/00 |
主分类号 |
H01L21/311 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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