| 摘要 |
<p>A precision feeding device 9 that drives a table 31 supported by a base 2 in a predetermined moving direction includes: a rod 41 connected to the table 31; a drive mechanism 4 that drives to move the rod 41 forward and backward in the moving direction; and a laser interferometer 5 that detects a displacement of the rod 41 relative to the base 2. The drive mechanism 4 includes a linear motor 44 that symmetrically applies a drive force on the rod 41 relative to an axis in the moving direction. A laser path 56 of the laser interferometer 5 passes through the rod 41 and extends in the moving direction, so that a moving axis of the rod 41, a thrust axis of the drive mechanism 4 and a detection axis of the laser interferometer 5 are aligned.</p> |
