Scanning electron microscope

摘要

To provide a scanning electron microscope that can detect reflected electrons of any emission angle, the scanning electron microscope, which obtains an image by detecting electrons from a sample (19) has: a control electrode (18) that discriminates between secondary electrons from the sample (19) and reflected electrons; a secondary electron conversion electrode (13) that generates secondary electrons by the impact of reflected electrons; a withdrawing electrode (12) that withdraws those secondary electrons; an energy filter (11) that discriminates between the secondary electrons withdrawn and electrons reflected from the sample (19); and a control calculation means (36) that selects a combination of voltages applied to the secondary electron conversion electrode (13), the withdrawing electrode (12), and energy filter (11).

主权项

1. A scanning electron microscope which acquires an image by detecting an electron emitted from a sample irradiated with a primary electron beam using a detector, comprising:
an electron source; an objective lens for converging the primary electron beam emitted from the electron source on the sample; a control electrode disposed between the objective lens and the sample; a secondary electron conversion electrode disposed between the objective lens and the detector to generate a secondary electron by impingement of the reflected electron; a withdrawing electrode that withdraws the secondary electron upward; an energy filter; and a control calculation unit which selects a combination of voltages applied to the secondary electron conversion electrode, the withdrawing electrode, and the energy filter.