发明名称 METHOD OF MANUFACTURING HEAT INSULATION WALL
摘要 The present invention relates to a method for manufacturing a heat insulation wall to economically manufacture a heat insulation member. The method for manufacturing a cylindrical heat insulation wall where a retention unit of a heater element is formed on an inner circumferential side comprises: a first process of processing a plate-shaped heat insulation member so that a groove part elongated from one surface to the other surface which is an opposite surface of the surface; a second process of processing the heating member to have an angle between the surface and the other surface, where the groove part is formed, perpendicular to the depth direction of the groove part to be the degree of 90 + 180/n (n is a natural number of 3 or more.); and a third process of processing a plurality of split heat insulation members to be joined so that the retention unit is formed on an inner circumference of the cylindrical heat insulation wall by the groove part, and also corresponds to the groove part of an adjacent split heat insulation member, as a process of manufacturing the cylindrical heat insulation wall by connecting a plurality of the heat insulation members as split heat insulation members.
申请公布号 KR20150021886(A) 申请公布日期 2015.03.03
申请号 KR20140102408 申请日期 2014.08.08
申请人 TOKYO ELECTRON LIMITED 发明人 KOBAYASHI MAKOTO
分类号 H01L21/22;H01L21/02;H01L21/324 主分类号 H01L21/22
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