| 摘要 |
<p>The present invention relates to a susceptor manufacturing apparatus and, more specifically, to a susceptor manufacturing apparatus capable of supplying uniformly mixed and distributed different kinds of reaction gases, and minimizing impact caused by a temperature difference between the reaction gases and the inside of a chamber. According to the present invention, the susceptor manufacturing apparatus comprises: a muffle forming a thin film by loading a base material therein; a heater heating the muffle such that the temperature of the inside of the muffle meets a process condition; an insulation chamber which uniformly maintains the temperature of the inside of the muffle by surrounding the muffle with the heater between the muffle and the insulation chamber, and has at least one first opening part; an external chamber surrounding the insulation chamber; a gas supplying means supplying different kinds of reaction gases; and a mixing means which uniformly mixes and heats the reaction gas and supplies the reaction gas to the muffle.</p> |
