Wafer container cleaning device

摘要

A wafer container cleaning device for cleaning container bodies and container covers of wafer containers includes a housing having a cleaning chamber defined therein, a rotor rotatably installed within the cleaning chamber of the housing, a plurality of container holders mounted to the rotor to removably hold the container bodies and the container covers, and a cleaning solution sprayer nozzle for spraying a cleaning solution toward the container bodies and the container covers held by the container holders. Each of the container holders includes a support tray having a body support portion for supporting each of the container bodies in an upside down state and a cover support portion for supporting each of the container covers.

主权项

1. A wafer container cleaning device for cleaning container bodies and container covers of wafer containers, comprising:
a housing having a cleaning chamber defined therein; a rotor rotatably installed within the cleaning chamber of the housing; a plurality of container holders mounted to the rotor to removably hold the container bodies and the container covers; a cleaning solution sprayer nozzle for spraying a cleaning solution toward the container bodies and the container covers held by the container holders; a tray nozzle arranged below the support tray to spray a cleaning solution into each of the container bodies; an air spray nozzle provided in the support tray to spray an air toward each of the container bodies; wherein each of the container holders includes a support tray having a body support portion for supporting each of the container bodies in an upside down state and a cover support portion for supporting each of the container covers, the support tray being swingably mounted to the rotor for making a swinging movement between a preparation position in which each of the container bodies and each of the container covers can be placed on or removed from the support tray and a cleaning position in which each of the container bodies and each of the container covers are subjected to a cleaning operation; wherein the support tray stays substantially horizontal in the preparation position but is kept swung away from the rotor in the cleaning position, and further comprising a locking unit for locking the support tray against movement in the cleaning position; wherein the support tray is opened radially outwards in the preparation position to allow each of the container bodies to slidingly move along the support tray when attaching or removing each of the container bodies; wherein the body support portion includes a pair of spaced-apart support rails arranged to support the frontal edges of each of the container bodies, and the cover support portion includes a support groove defined on the support tray to hold one edge of each of the container covers; wherein the support tray includes a support bar arranged to support each of the container bodies and each of the container covers when the support tray is in the cleaning position; wherein the support tray includes an open bottom portion arranged between the support rails; wherein the tray nozzle is installed in a position where the tray nozzle does not interfere with each of the container bodies; wherein the tray nozzle is designed to inject a dry gas when the cleaning operation comes to an end; and wherein the air spray nozzle is installed in a position where the air spray nozzle does not interfere with each of the container bodies.