发明名称 METHOD FOR PRODUCING INORGANIC OXIDE PARTICLE THIN FILM
摘要 <p>PROBLEM TO BE SOLVED: To provide: a method for producing an inorganic oxide particle thin film which is formed on a substrate, and has high necking property of inorganic oxide particles, excellent electron conductivity between particles, high crystallinity, and pores; an inorganic oxide particle thin film obtained by the method; and a dye-sensitized solar cell element using the thin film.SOLUTION: The method for producing an inorganic oxide particle thin film includes a step a of forming a precursor film of the inorganic oxide particle thin film composed of inorganic oxide particles on a substrate, and a step b of exposing the substrate with the obtained precursor film to a plasma of an inert gas, in a high frequency electric field.</p>
申请公布号 JP2015040160(A) 申请公布日期 2015.03.02
申请号 JP20130173524 申请日期 2013.08.23
申请人 MITSUI CHEMICALS INC 发明人 KOIKE KATSUHIKO;UENO KEIJI
分类号 C01G23/04;H01L31/04 主分类号 C01G23/04
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