| 摘要 |
<p>The present invention relates to a plasma chemical vapor apparatus and an electrode unit for a plasma chemical vapor apparatus. The electrode unit is provided as a hollow tubular body having a circular cross section when viewed in an axial line direction, and includes a circular electrode periodically rotating in a predetermined rotary angle to have a portion of an outer circumferential surface corresponding to the rotary angle be positioned toward a base member; and a rotary angle setter periodically rotating the circular electrode by the rotary angle. Accordingly, provided are a plasma chemical vapor apparatus and an electrode unit for a plasma chemical vapor apparatus capable of extending cycles for cleaning and replacing the circular electrode, and minimizing particle generation and abnormal arc generation to improve efficiency in use.</p> |
