发明名称 WIDTH MEASURING APPARATUS, DEFECT INSPECTION DEVICE AND WIDTH MEASURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a width measuring apparatus for determining the width of a measuring object by simple arithmetic processing.SOLUTION: A width measuring apparatus includes a transverse direction determination part (43) for determining a direction orthogonal to such virtual straight lines that a distance between two parallel virtual straight lines sandwiching a linear defect candidate is minimum, as a transverse direction of the linear defect candidate, and a second measuring part (45) for measuring the size of an orthogonal projection component to the transverse direction of a measuring object, of a width of the linear defect candidate in a direction set beforehand.</p>
申请公布号 JP2015040828(A) 申请公布日期 2015.03.02
申请号 JP20130173471 申请日期 2013.08.23
申请人 SHARP CORP 发明人 IDONO TAMON
分类号 G01B11/02;G01B11/30;G01N21/88;G01N21/892;G01N21/896;G06T1/00 主分类号 G01B11/02
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