发明名称 |
CHEMICAL MECHANICAL POLISHING COMPOSITION FOR POLISHING A SAPPHIRE SURFACE AND METHODS OF USING SAME |
摘要 |
A method of polishing a sapphire substrate is provided, comprising: providing a substrate having an exposed sapphire surface; providing a chemical mechanical polishing slurry, wherein the chemical mechanical polishing slurry comprises, as initial components: colloidal silica abrasive, wherein the colloidal silica abrasive has a negative surface charge; and, wherein the colloidal silica abrasive exhibits a multimodal particle size distribution with a first particle size maximum between 2 and 25 nm; and, a second particle size maximum between 75 and 200 nm; optionally, a biocide; optionally, a nonionic defoaming agent; and, optionally, a pH adjuster. A chemical mechanical polishing composition for polishing an exposed sapphire surface is also provided. |
申请公布号 |
US2015053642(A1) |
申请公布日期 |
2015.02.26 |
申请号 |
US201313975890 |
申请日期 |
2013.08.26 |
申请人 |
Nitta Haas Incorporated ;Rohm and Haas Electronic Materials CMP Holdings, Inc. |
发明人 |
Bulick Allen S.;Nishizawa Hideaki;Moriyama Kazuki;Yoshida Koichi;Ezawa Shunji;Arumugam Selvanathan |
分类号 |
H01L21/02;C09G1/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
1. A method of polishing a sapphire substrate, comprising:
providing a substrate having an exposed sapphire surface; providing a chemical mechanical polishing slurry having a pH of >8 to 12, wherein the chemical mechanical polishing slurry comprises, as initial components:
colloidal silica abrasive, wherein the colloidal silica abrasive has a negative surface charge; and, wherein the colloidal silica abrasive exhibits a multimodal particle size distribution with a first particle size maximum between 2 and 25 nm; and, a second particle size maximum between 75 and 200 nm;optionally, a biocide;optionally, a nonionic defoaming agent; and,optionally, a pH adjuster; providing a chemical mechanical polishing pad; creating dynamic contact at an interface between the chemical mechanical polishing pad and the substrate; and dispensing the chemical mechanical polishing slurry onto the chemical mechanical polishing pad at or near the interface between the chemical mechanical polishing pad and the substrate; wherein at least some sapphire is removed from the exposed sapphire surface of the substrate and wherein the chemical mechanical polishing slurry exhibits a sapphire removal rate of ≧14,000 Å/hr with a platen speed of 120 revolutions per minute, a carrier speed of 120 revolutions per minute, a chemical mechanical polishing slurry flow rate of 400 ml/min, a nominal down force of 34.3 kPa on a 300 mm polishing machine; and, wherein the chemical mechanical polishing pad is a polyurethane impregnated non-woven polishing pad. |
地址 |
Osaka JP |