| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a micro heater which inhibits heat stress.SOLUTION: A micro heater includes multiple heater wiring parts 18, each of which includes a pair of wiring lines 20 that are disposed so as to be arranged parallel to each other and a folding part 22 connecting one-side ends of the pair of wiring lines 20 with each other. The other-side ends of the wiring lines 20 of the multiple heater wiring parts 18 are connected with each other at connection parts 24 and the folding parts 22 form free ends.</p> |
