| 摘要 |
A pressing mechanism of a polishing head (13), including: a first pressing body configured so as to include a first airbag (132) and a first pressure disc (134) formed so that a portion near the center of a contact surface which comes into contact with an elastic body (137) is convex-shaped towards the elastic body (137); and a second pressing body, which is formed as a cylinder having the first pressure disc (134) disposed on the inner circumferential side thereof, and which is configured so as to include a second airbag (133) and a second pressure disc (135) formed so that a portion near the outer edge of a contact surface which comes into contact with the elastic body (137) is concave-shaped towards the elastic body (137). A pressure fluid is sealed in the first airbag (132) and the second airbag (133), and the pressing force from the first pressing body and the second pressing body generated towards the rear surface of a substrate (W) in accordance with the quantity of the pressure fluid is applied to the rear surface side of the substrate (W) through the elastic body (137). |
