ACTUATOR

摘要

The actuator includes a vibration plate including a fixing portion for fixing the vibration plate to a holding member, and a connection portion for connecting a center portion and the fixing portion, and is provided between a surface and a friction-sliding surface in a direction in which the vibration plate is pressed against the rotor by a pressurizing force produced by a pressure member. When finishing a surface on which a piezoelectric device is to be fixed to the vibration plate to a uniform surface by polishing, a decrease in the performance of the ultrasonic motor due to deformation of the vibration plate that is caused by warping of support portions that extend from both ends thereof or by burrs or the like can be prevented, and the time required to polish the vibration plate can be reduced.

主权项

1. An actuator comprising:
a vibrator including a vibration plate and a piezoelectric device that generates a vibration in the vibration plate; a holding member that holds the vibrator; a friction member configured to contact the vibrator with friction, the friction member relatively moving with respect to the vibrator by the vibration; and a pressure member configured to contact the vibrator with a pressure onto the friction member, wherein the vibration plate includes a center portion including a surface on which the piezoelectric device is fixed, and support portions that extend from both ends of the center portion and are connected to the holding member; the vibration plate includes a friction-sliding surface that contacts the friction member on another surface on an opposite side to the surface; the support portion includes a fixing portion for fixing to the holding member, and a connection portion for connecting the center portion and the fixing portion; and the fixing portion is located between a position on the surface and a position on the friction-sliding surface in a pressing direction in which the vibrator is pressed onto the friction member by the pressure member.