| 摘要 |
A micromechanical sensor is provided having a substrate having a main plane of extension and having a movable element, the movable element being pivotable about an axis of rotation that is essentially parallel to the main plane of extension, from a rest position into a deflected position, the movable element having an asymmetrical mass distribution relative to the axis of rotation, so that, as a function of a force exerted on the movable element oriented essentially perpendicular to the main plane of extension, a deflection movement of the movable element is produced in the form of a pivot movement about the axis of rotation, the micromechanical sensor having a damping element, the damping element being pivotable about the axis of rotation,
the damping element being connected to the movable element so as to be capable of rotational movement, orthe damping element being integrated with the movable element. |
| 主权项 |
1. A micromechanical sensor, comprising:
a substrate having a main plane of extension and having a movable element that is pivotable about an axis of rotation that is essentially parallel to the main plane of extension, from a rest position into a deflected position, wherein the movable element has an asymmetrical mass distribution relative to the axis of rotation, so that, as a function of a force exerted on the movable element oriented essentially perpendicular to the main plane of extension, a deflection movement of the movable element is produced in the form of a pivot movement about the axis of rotation; and a damping structure having a first damping element and being pivotable about the axis of rotation, wherein one of:
the first damping element is connected to the movable element so as to be capable of rotational movement, andthe first damping element is integrated with the movable element. |
