| 摘要 |
[Problem] To provide an indicator capable of easily detecting whether treatment of at least one type selected from the group consisting of plasma, ozone, ultraviolet rays, and radical-containing gas is performed uniformly on the entire substrate in an electronic device manufacturing apparatus, and a method for designing and/or managing the apparatus that uses the indicator. [Solution] An indicator used in an electronic device manufacturing apparatus is characterized in that (1) the indicator detects at least one type selected from the group consisting of plasma, ozone, ultraviolet rays, and radical-containing gas, (2) the shape of the indicator is the same as a substrate used in the electronic device manufacturing apparatus, (3) the indicator includes a discoloration layer, and (4) the discoloration layer is formed by an ink composition the color of which changes or disappears by reacting with the at least one type selected from the group consisting of plasma, ozone, ultraviolet rays, and radical-containing gas. |
