发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processing device capable of three-dimensionally verifying a processed state of a workpiece having subjected to the processing by the processing device.SOLUTION: A processing device includes: workpiece holding means for holding a workpiece; processing means for processing the workpiece held by the workpiece holding means; and processing feed means for feeding the workpiece holding means and the processing means to a feeding direction (an X-axis direction). The processing device further includes: a three dimensional image-capturing mechanism for image-capturing the workpiece held by the workpiece holding means three-dimensionally in the X axis direction, a Y-axis direction orthogonal to the X-axis direction, and a Z-axis direction orthogonal to the X-axis direction and the Y-axis direction, and outputting the captured image signal; a processing means for generating a three-dimensional image based on the image signal outputted from the three dimensional image-capturing mechanism; and an output means for outputting the three-dimensional image generated by the processing means.
申请公布号 JP2015038438(A) 申请公布日期 2015.02.26
申请号 JP20130169748 申请日期 2013.08.19
申请人 DISCO ABRASIVE SYST LTD 发明人 ITO YUSAKU
分类号 G01B11/24;B23K26/00;G01B9/02;G01B11/00;G06T1/00;H01L21/66 主分类号 G01B11/24
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