| 摘要 |
<p>A photoacoustic metrology tool comprises at least one light source for optically exciting a unit under test (UUT). A volume is provided for capturing acoustic energy emanating from the UUT as result of optical excitation thereof. An acoustic pick-up is provided for receiving the captured acoustic energy and generating a corresponding electrical signal. A control means is co-operable with the light source and the acoustic pickup for controlling photoacoustic analysis of the UUT.</p> |
