发明名称 Device for generating plasma and directing an electron beam towards a target
摘要 <p>A device (2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII) for generating plasma and for directing an electron beam towards a target (3); the device (2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII) comprises a hollow element (5); an activation group (21), which is designed to impose a difference in potential between the hollow element (5) and another element which is separate from it, in such a way as to direct the electron beam towards said separate element; and a de Laval nozzle (23), having at least one tapered portion (13), which is tapered towards the separate element and is designed to accelerate a gas flow towards the separate element.</p>
申请公布号 KR20150020606(A) 申请公布日期 2015.02.26
申请号 KR20147036420 申请日期 2013.06.11
申请人 发明人
分类号 H01J3/02;H01J37/077;H01J37/18;H01J37/301;H01J37/305;H01J37/315;H01J37/34 主分类号 H01J3/02
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