METHOD FOR FORMING A METAL OXIDE THIN-FILM PATTERN AND PRODUCTION METHOD FOR AN LED ELEMENT USING NANOIMPRINTING
摘要
A method for forming a metal oxide thin film pattern using nanoimprinting according to one embodiment of the present invention includes: coating a photosensitive metal-organic material precursor solution on a substrate; pressurizing the photosensitive metal-organic material precursor coating layer to a mold patterned to have a protrusion and depression structure; forming the metal oxide thin film pattern by irradiating ultraviolet rays to the pressurized photosensitive metal-organic material precursor coating layer to cure it; and removing the patterned mold from the metal oxide thin film pattern.
申请公布号
EP2474996(A4)
申请公布日期
2015.02.25
申请号
EP20090849030
申请日期
2009.11.11
申请人
KOREA INSTITUTE OF MACHINERY & MATERIALS
发明人
PARK, HYEONG-HO;CHOI, DAE-GEUN;JEONG, JUN-HO;KIM, KI-DON;CHOI, JUN-HYUK;LEE, JI-HYE;PARK, SEONG-JE;JEON, SO-HEE;KIM, SA-RAH