| 摘要 |
<p>A reactor (100) may be used for hydrogenating tetrachlorosilane. The reactor (100) has at least one part fabricated from a silicon carbide-based material of construction. The reactor (100) may include i) a pressurizable shell (101), ii) a thermal insulator (102) surrounded by the pressurizable shell (101), iii) a heating element (106) surrounded by the thermal insulator (102), and iv) a reaction chamber (107) surrounded by the heating element (106).</p> |
