誘導結合プラズマ処理装置,申请号JP20130146049-传众专利搜索

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发明名称	誘導結合プラズマ処理装置
摘要
申请公布号	JP5674871(B2)	申请公布日期	2015.02.25
申请号	JP20130146049	申请日期	2013.07.12
申请人	東京エレクトロン株式会社	发明人	齊藤均;佐藤亮
分类号	H01L21/3065;H05H1/46	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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