| 摘要 |
<p>The present invention relates to an apparatus for inspecting a light emitting device. The apparatus for inspecting light emitting devices comprises: a chuck which supports the light emitting devices each of which includes a front electrode and a rear electrode and is coated with a conductive material layer; a probe card including a probe which is disposed on an upper portion of the chuck and in contact with the front electrode to apply an electrical signal; and an integrating sphere which is coupled to the probe card to analyze light emitted from the light emitting device which is in contact with the probe and inspect an optical characteristic of the light emitting device contacting the probe. Here, the conductive material layer is grounded, and the light emitting devices are supported by the chuck in a state where the light emitting devices are attached to a conductive mount film. The rear electrodes of the light emitting devices are grounded through the conductive mount film and the conductive material layer.</p> |
